G. H. Ho*, C.-J. Liu, C.-H. Yen, M.-H. Ho and S.-Y. Wu,Ionic outgassing from photoacid generators upon irradiation at 13.5 nm,Microelectron. Eng,85 (11),85 (11),pp2213-2219 (SCI)
| 學年度 | 2008 |
|---|---|
| 期刊等級 | SCI |
| 論文名稱(篇名) | Ionic outgassing from photoacid generators upon irradiation at 13.5 nm |
| 期刊名 | Microelectron. Eng |
| 卷數 | 85 (11) |
| 期數 | 85 (11) |
| 起頁 | 2213 |
| 迄頁 | 2219 |
| 全部作者 | G. H. Ho*, C.-J. Liu, C.-H. Yen, M.-H. Ho and S.-Y. Wu |
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