Grace H. Ho,*, Fu-H. Kang, Huang-W. Fu, Yu-H. Shih, Hok-S. Fung, Wan-P. Ku, Yu-S. Cheng, and Pei-J. Wu,2010,Absorption and loss of film thickness in photoresists and underlayer materials upon irradiation at 13.5 nm,
Proceedings of SPIE,7636,pp76362U-1-76362U-12 (EI)
| 學年度 | 2010 |
|---|---|
| 期刊等級 | EI |
| 論文名稱(篇名) | Absorption and loss of film thickness in photoresists and underlayer materials upon irradiation at 13.5 nm |
| 期刊名 | Proceedings of SPIE |
| 出版日期 | 2010-00-00 |
| 卷數 | 7636 |
| 起頁 | 76362U-1 |
| 迄頁 | 76362U-12 |
| 總頁數 | 12 |
| 全部作者 | Grace H. Ho,*, Fu-H. Kang, Huang-W. Fu, Yu-H. Shih, Hok-S. Fung, Wan-P. Ku, Yu-S. Cheng, and Pei-J. Wu |
| 著作人數 | 8 |
| 作者型態 | First Author / Corresponding Author |
| 使用語言 | 英文 |
| 所屬計畫案 | NSC98-2120-M-009-007 and NSC98-2113-M-390-005. |
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