Grace H. Ho*, Chih-H. Shao, Jia-J. Sung, Fu-H. Kang, Chih-B. Kao, Wei-L. Hung, Yu-L. Chou, and Yen-H. Huang,2012,Outgassing and photochemical studies of photosensitive films upon irradiation at 13.5nm,

Journal of Vacuum Science and Technology B,30,5,pp051602- (SCI)

學年度	2012
期刊等級	SCI
論文名稱(篇名)	Outgassing and photochemical studies of photosensitive films upon irradiation at 13.5nm
期刊名	Journal of Vacuum Science and Technology B
出版日期	2012-07-27
卷數	30
期數	5
起頁	051602
總頁數	10
全部作者	Grace H. Ho*, Chih-H. Shao, Jia-J. Sung, Fu-H. Kang, Chih-B. Kao, Wei-L. Hung, Yu-L. Chou, and Yen-H. Huang
著作人數	8
作者型態	First Author
使用語言	英文
所屬計畫案	NSC 99-2113 -M-390-003 and NSC 100-2120 -M-009-010.

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